Total-internal-reflection Holographic Photo-lithography by Using Incoherent Light
نویسندگان
چکیده
منابع مشابه
Guiding Light by and beyond the Total Internal Reflection Mechanism
Photonics plays an important role in modern technologies, e.g. in telecommunications and sensing systems. Waveguiding structures with microand nano-meter scale features are the basic building blocks of photonic circuits. Large varieties of structures have been used by scientists and engineers. These range from the conventional planar and channel waveguides, which work on the basis of the total-...
متن کاملExtreme ultraviolet interference lithography with incoherent light
In order to address the crucial problem of high-resolution low line-edge roughness resist for extreme ultraviolet (EUV) lithography, researchers require significant levels of access to high-resolution EUV exposure tools. The prohibitively high cost of such tools, even microfield tools, has greatly limited this availability and arguably hindered progress in the area of EUV resists. To address th...
متن کاملIncoherent Digital Holographic Microscopy with Coherent and Incoherent Light
Holography is an attractive imaging technique as it offers the ability to view a complete three-dimensional volume from one image. However, holography is not widely applied to the regime of fluorescence microscopy, because fluorescent light is incoherent and creating holograms requires a coherent interferometer system. We review two methods of generating digital Fresnel holograms of threedimens...
متن کاملAtom lithography with a holographic light mask.
In atom lithography with optical masks, deposition of an atomic beam on a given substrate is controlled by a standing light-wave field. The lateral intensity distribution of the light field is transferred to the substrate with nanometer scale. We have tailored a complex pattern of this intensity distribution through diffraction of a laser beam from a hologram that is stored in a photorefractive...
متن کاملTotal internal reflection fluorescence.
Total internal reflection fluorescence (TIRF) is an optical effect particularly well-suited to the study of molecular and cellular phenomena at liquid/solid interfaces. Such interfaces are central to a wide range of biochemical and biophysical processes: binding to and triggering of cells by hormones, neurotransmitters, and antigens; blood coagulation at foreign surfaces; electron transport in ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Korean Journal of Optics and Photonics
سال: 2009
ISSN: 1225-6285
DOI: 10.3807/kjop.2009.20.6.334